Semiconductors are a core technology used in various fields, so much so that they can be called the heart of modern industry.
At the foundation of all the cutting-edge technologies we use, including smartphones, self-driving cars, and artificial intelligence systems, are semiconductors manufactured through highly precise processes.

This book is designed to be utilized simultaneously in both practical and educational settings, starting with the oxidation process, one of the core processes of semiconductors, and integrating flow understanding, practice-based education, and safety management guidelines for the front-end process.

This textbook is specifically designed for learners seeking firsthand experience with semiconductor processes in university and process training settings, and follows the following organizational principles:

Organic connection between theory and practice: The physical and chemical principles of the process are fully explained and organized so that they can be applied to the equipment and process conditions encountered in actual practice.

Process-centric intuitive flow: We visualized process maps, flowcharts, and comparison diagrams to help you clearly understand the position and role of each unit process within the overall flow of the entire process.

Emphasis on Safety and Ethics: Because the semiconductor FAB environment involves handling high-hazard chemicals and gases, our safety-focused training includes MSDS training, case study analysis, ESD prevention, and the Buddy System.

Practicality and Scalability: Links are available to enhance learners' practical application skills, such as process logs, power efficiency analyses, and equipment checklists that can be created after practice.

We hope this book will serve as a bridge to a fundamental understanding of the entire semiconductor process for students new to the field, and will help cultivate technical thinking skills and safety awareness through practical training and accident prevention education close to the actual field.

Finally, I hope this textbook will contribute, even if only slightly, to practical training in the field. We will continue to develop it into even better educational content through continuous feedback and improvement.